Single step deposition of different morphology ZnO gas sensing films

Á Németh, E. Horváth, Z. Lábadi, L. Fedák, I. Bársony

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Al-doped ZnO thin films were deposited onto fixed silicon substrates by dc reactive sputtering. The inherent lateral inhomogeneity in the deposited film with areas of different morphology and sheet resistance revealed different sensing properties. This novel approach offers the possibility of controllable deposition of ZnO sensing layers for the simultaneous manufacturing of sensors with different properties in an array in a single technological step.

Original languageEnglish
Pages (from-to)157-160
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume127
Issue number1
DOIs
Publication statusPublished - Oct 20 2007

Keywords

  • Gas sensors
  • Reactive magnetron sputtering
  • Zinc aluminum oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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