Simultaneous preparation of amorphous solid carbon films, and their cluster building blocks

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6 Citations (Scopus)

Abstract

The chemical vapor deposition (CVD) has 'dusty plasma' condition region, under which circumstances there is a strong tendency for formation of nano-particles in the plasma by aggregation of ions. Using this phenomena carbon nano-particles have been prepared simultaneously with solid hydrogenated amorphous carbon (a-C:H) films. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) were used to study the morphology of nano-particles and the film surfaces as well. Size distributions and shape factors of nano-clusters have been obtained from TEM results; their change with applied self-bias voltage was also examined. The bonding properties of deposited layers and nano-clusters were investigated by infrared spectroscopy. A comparative analysis concerning the morphology of the films and the nano-clusters was performed.

Original languageEnglish
Pages (from-to)981-986
Number of pages6
JournalJournal of Non-Crystalline Solids
Volume351
Issue number12-13
DOIs
Publication statusPublished - May 1 2005

Fingerprint

Carbon films
preparation
carbon
Transmission electron microscopy
Plasmas
transmission electron microscopy
Amorphous carbon
dusty plasmas
Bias voltage
Chemical vapor deposition
Infrared spectroscopy
Atomic force microscopy
tendencies
Carbon
Agglomeration
infrared spectroscopy
vapor deposition
atomic force microscopy
Ions
electric potential

ASJC Scopus subject areas

  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

Cite this

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title = "Simultaneous preparation of amorphous solid carbon films, and their cluster building blocks",
abstract = "The chemical vapor deposition (CVD) has 'dusty plasma' condition region, under which circumstances there is a strong tendency for formation of nano-particles in the plasma by aggregation of ions. Using this phenomena carbon nano-particles have been prepared simultaneously with solid hydrogenated amorphous carbon (a-C:H) films. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) were used to study the morphology of nano-particles and the film surfaces as well. Size distributions and shape factors of nano-clusters have been obtained from TEM results; their change with applied self-bias voltage was also examined. The bonding properties of deposited layers and nano-clusters were investigated by infrared spectroscopy. A comparative analysis concerning the morphology of the films and the nano-clusters was performed.",
author = "M. Veres and M. F{\"u}le and S. T{\'o}th and M. Ko{\'o}s and I. P{\'o}csik and J. Kokavecz and Z. T{\'o}th and G. Radn{\'o}czi",
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T1 - Simultaneous preparation of amorphous solid carbon films, and their cluster building blocks

AU - Veres, M.

AU - Füle, M.

AU - Tóth, S.

AU - Koós, M.

AU - Pócsik, I.

AU - Kokavecz, J.

AU - Tóth, Z.

AU - Radnóczi, G.

PY - 2005/5/1

Y1 - 2005/5/1

N2 - The chemical vapor deposition (CVD) has 'dusty plasma' condition region, under which circumstances there is a strong tendency for formation of nano-particles in the plasma by aggregation of ions. Using this phenomena carbon nano-particles have been prepared simultaneously with solid hydrogenated amorphous carbon (a-C:H) films. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) were used to study the morphology of nano-particles and the film surfaces as well. Size distributions and shape factors of nano-clusters have been obtained from TEM results; their change with applied self-bias voltage was also examined. The bonding properties of deposited layers and nano-clusters were investigated by infrared spectroscopy. A comparative analysis concerning the morphology of the films and the nano-clusters was performed.

AB - The chemical vapor deposition (CVD) has 'dusty plasma' condition region, under which circumstances there is a strong tendency for formation of nano-particles in the plasma by aggregation of ions. Using this phenomena carbon nano-particles have been prepared simultaneously with solid hydrogenated amorphous carbon (a-C:H) films. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) were used to study the morphology of nano-particles and the film surfaces as well. Size distributions and shape factors of nano-clusters have been obtained from TEM results; their change with applied self-bias voltage was also examined. The bonding properties of deposited layers and nano-clusters were investigated by infrared spectroscopy. A comparative analysis concerning the morphology of the films and the nano-clusters was performed.

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EP - 986

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

SN - 0022-3093

IS - 12-13

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