Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm

Bálint Balogh, P. Gordon, Bálint Sinkovics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Thermal effect plays an important role during frequency tripled nanosecond Nd:YAG laser ablation of polyimide. This paper describes simulation results and experimental investigations of laser induced temperature change in polyimide. The experimental results show that the ablation rate is temperature dependent, which means the underlying copper layer and the pulse repetition frequency (PRF) influence the etch depth. Based on our model it will be possible to control the processing parameters according to the pattern geometry for a better exploitation of laser micromachining.

Original languageEnglish
Title of host publication28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005
Pages426-430
Number of pages5
Volume2005
DOIs
Publication statusPublished - 2005
Event28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005 - Wiener Neustadt, Austria
Duration: May 19 2005May 20 2005

Other

Other28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005
CountryAustria
CityWiener Neustadt
Period5/19/055/20/05

Fingerprint

Laser ablation
Polyimides
Lasers
Micromachining
Ablation
Thermal effects
Copper
Temperature
Geometry
Processing

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Balogh, B., Gordon, P., & Sinkovics, B. (2005). Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm. In 28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005 (Vol. 2005, pp. 426-430). [1491066] https://doi.org/10.1109/ISSE.2005.1491066

Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm. / Balogh, Bálint; Gordon, P.; Sinkovics, Bálint.

28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. Vol. 2005 2005. p. 426-430 1491066.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Balogh, B, Gordon, P & Sinkovics, B 2005, Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm. in 28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. vol. 2005, 1491066, pp. 426-430, 28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005, Wiener Neustadt, Austria, 5/19/05. https://doi.org/10.1109/ISSE.2005.1491066
Balogh B, Gordon P, Sinkovics B. Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm. In 28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. Vol. 2005. 2005. p. 426-430. 1491066 https://doi.org/10.1109/ISSE.2005.1491066
Balogh, Bálint ; Gordon, P. ; Sinkovics, Bálint. / Simulation and indirect measurement of temperature change in polyimide induced by laser ablation at 355 nm. 28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. Vol. 2005 2005. pp. 426-430
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