Simulating and monitoring the resonant frequency of MEMS for failure detection and prediction

Szilárd Jámborházi, István Hegedüs, Márta Rencz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper discusses the necessity of failure detection and failure prediction in MEMS devices an proposes a method based on monitoring the resonant frequency. Most of the failures change the Young-modulus, the spring constant or the mass of the moving elements and thus the resonant frequency while others have an effect on damping or cause electrical leakage influencing the amplitude of the vibration. We propose architecture for the circuit, which enables to detect light anomalies and switches the failing or degrading but still functioning parts of the MEMS off. The method and architecture are applicable for many MEMS devices, not only for resonant ones. Finite Element Analysis (FEA), simulations and experiments are supporting the theory.

Original languageEnglish
Title of host publicationProceedings of the 2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop, IMS3TW 2010
DOIs
Publication statusPublished - Aug 11 2010
Event2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop, IMS3TW 2010 - Montpellier, La Grande Motte, France
Duration: Jun 7 2010Jun 9 2010

Publication series

NameProceedings of the 2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop, IMS3TW 2010

Other

Other2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop, IMS3TW 2010
CountryFrance
CityMontpellier, La Grande Motte
Period6/7/106/9/10

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Keywords

  • Failure detection
  • Resonant frequency
  • Simulation

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Jámborházi, S., Hegedüs, I., & Rencz, M. (2010). Simulating and monitoring the resonant frequency of MEMS for failure detection and prediction. In Proceedings of the 2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop, IMS3TW 2010 [5502999] (Proceedings of the 2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop, IMS3TW 2010). https://doi.org/10.1109/IMS3TW.2010.5502999