Simple method for the preparation of inp based samples for TEM investigation

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Abstract

A novel, rapid, and simple method is described for the preparation of InP based samples for investigation by transmission electron microscopy (TEM). The key feature of the technique is Ar+ ion bombardment in an iodine ambient. Cross sectional micrographs of Au/InP samples are shown as an example. The technique developed produces a large area of transparent region. Copyright1991 WileyLiss, Inc.

Original languageEnglish
Pages (from-to)325-328
Number of pages4
JournalJournal of Electron Microscopy Technique
Volume18
Issue number3
DOIs
Publication statusPublished - Jul 1991

Keywords

  • Ar ion bombardment
  • InP
  • Ion milling
  • Transparent region

ASJC Scopus subject areas

  • Anatomy

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