Simple experiment on the sputtering rate of solids in gas discharges

Peter Hartmann, Jorge C. Reyes, I. Korolov, Lorin S. Matthews, Truell W. Hyde

Research output: Contribution to journalArticle

Abstract

We present a very simple and sensitive method to measure the sputtering rate of solid materials in stationary low-pressure gas discharges. The method is based on the balance of the centrifugal force and the confinement electric force acting on a single electrically charged dust particle in a rotating environment. We demonstrate the use and sensitivity of this method in a capacitively coupled radio frequency argon discharge. We were able to detect a reduction of 10 nm in the diameter of a single dust particle.

Original languageEnglish
Article number060701
JournalPhysics of Plasmas
Volume24
Issue number6
DOIs
Publication statusPublished - Jun 1 2017

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gas discharges
rotating environments
dust
sputtering
centrifugal force
radio frequencies
low pressure
argon
sensitivity

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Hartmann, P., Reyes, J. C., Korolov, I., Matthews, L. S., & Hyde, T. W. (2017). Simple experiment on the sputtering rate of solids in gas discharges. Physics of Plasmas, 24(6), [060701]. https://doi.org/10.1063/1.4985080

Simple experiment on the sputtering rate of solids in gas discharges. / Hartmann, Peter; Reyes, Jorge C.; Korolov, I.; Matthews, Lorin S.; Hyde, Truell W.

In: Physics of Plasmas, Vol. 24, No. 6, 060701, 01.06.2017.

Research output: Contribution to journalArticle

Hartmann, Peter ; Reyes, Jorge C. ; Korolov, I. ; Matthews, Lorin S. ; Hyde, Truell W. / Simple experiment on the sputtering rate of solids in gas discharges. In: Physics of Plasmas. 2017 ; Vol. 24, No. 6.
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