Sensitivity of Makyoh topography

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The sensitivity of both qualitative and quantitative (grid-projection) Makyoh topography is analysed using analytic calculations. The essential difference between the two versions is pointed out. The sensitivity is defined on the analogy of the modulation transfer function and is expressed in terms of instrumental parameters and the detection limits of the imaging sensor in an analytic form. It is shown that the qualitative version is more sensitive than the quantitative one for surface features having small spatial wavelength. The effects of small-scale surface roughness and non-ideal collimation of the illumination is considered and it is shown that these effects decrease the sensitivity.

Original languageEnglish
Pages (from-to)220-224
Number of pages5
JournalMaterials Science in Semiconductor Processing
Volume9
Issue number1-3
DOIs
Publication statusPublished - Feb 2006

Fingerprint

Optical transfer function
Topography
topography
Lighting
Surface roughness
Imaging techniques
Wavelength
sensitivity
Sensors
modulation transfer function
collimation
surface roughness
projection
illumination
grids
sensors
wavelengths

Keywords

  • Optical diagnostic techniques
  • Surface defects
  • Surface flatness

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Sensitivity of Makyoh topography. / Riesz, F.

In: Materials Science in Semiconductor Processing, Vol. 9, No. 1-3, 02.2006, p. 220-224.

Research output: Contribution to journalArticle

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