Sensitive, selective and stable CH4 detection using semiconducting Ga2O3 thin films

M. Fleischer, H. Meixner

Research output: Contribution to journalArticle

49 Citations (Scopus)


Due to the large operating temperature range of Ga2O3 thin films a temperature programmed setting of the gas sensitivity is possible. In the temperature range between 500 to 650 °C the sensory may be operated as sensitive sensors for reducing gases (e.g., CO, H2) based on chemisorption mechanisms. Increasing the temperature causes a strong decrease in the sensitivity to these gas and a strong increase in the sensitivity to CH4. At an operating temperature of 740–780 °C no significant sensitivity of the sensor to H2 or CO in wet air is observed but there is a sensitivity conductance increase by about a factor of 80 as a response to 0.5 vol.% CH4. In the case of a further temperature increase, the effect of H2 CO is inveretd to a conductivity decrease, whereas the CH4 sensitivity remains almost unchanged. A similar behaviour is observed in the case of binary gas mixtures. At a tuned operating temperature, there is no significant effect resulting from the coadsorption of other reducing gases or humidity on the CH4 sensor characteristics. Resistance values at this temperature have proven to be stable over several hundreds of hours even in the case of continuous exposure to CH4.

Original languageEnglish
Pages (from-to)81-84
Number of pages4
Journal"Sensors and Actuators, B: Chemical"
Issue number1-3
Publication statusPublished - Jan 1 1995


  • Gallium
  • Methane detection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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