Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

Z. Donkó, J. Schulze, U. Czarnetzki, D. Luggenhölscher

Research output: Contribution to journalArticle

52 Citations (Scopus)

Abstract

At low pressures, nonlinear self-excited plasma series resonance (PSR) oscillations are known to drastically enhance electron heating in geometrically asymmetric capacitively coupled radio frequency discharges by nonlinear electron resonance heating (NERH). Here we demonstrate via particle-in-cell simulations that high-frequency PSR oscillations can also be excited in geometrically symmetric discharges if the driving voltage waveform makes the discharge electrically asymmetric. This can be achieved by a dual-frequency (f+2f) excitation, when PSR oscillations and NERH are turned on and off depending on the electrical discharge asymmetry, controlled by the phase difference of the driving frequencies.

Original languageEnglish
Article number131501
JournalApplied Physics Letters
Volume94
Issue number13
DOIs
Publication statusPublished - 2009

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radio frequency discharge
oscillations
heating
electrons
waveforms
low pressure
asymmetry
electric potential
cells
excitation
simulation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges. / Donkó, Z.; Schulze, J.; Czarnetzki, U.; Luggenhölscher, D.

In: Applied Physics Letters, Vol. 94, No. 13, 131501, 2009.

Research output: Contribution to journalArticle

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