Selectivity in high-temperature operated semiconductor gas-sensors

M. Fleischer, H. Meixner

Research output: Contribution to journalArticle

81 Citations (Scopus)

Abstract

High-temperature operated metal oxides like Ga2O3 developed in the last years show certain advantages like reproducibility and robustness resulting from a conduction mechanism which is independent on grain boundary effects. But similar to the lower temperature operated oxides like SnO2 and ZnO they also possess broad band sensitivity characteristics, i.e. they respond to all gases with similar chemical properties. This paper shows to which extent strategies to achieve selective gas detection with one single sensor are applicable with these metal oxides. Temperature variations, surface modifications and the use of physical and chemical filters directly attached to the sensor surface are discussed in this paper.

Original languageEnglish
Pages (from-to)179-187
Number of pages9
JournalSensors and Actuators, B: Chemical
Volume52
Issue number1-2
DOIs
Publication statusPublished - Sep 15 1998

Keywords

  • GaO
  • Gas filters
  • Gas sensor
  • High temperature
  • Selectivity
  • Semiconducting metal oxides
  • Thick films
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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