Selectivity enhancement of a WO3/TiO2 gas sensor by the use of a four-point electrode structure

M. Gerlich, S. Kornely, M. Fleischer, H. Meixner, R. Kassing

Research output: Contribution to journalConference article

27 Citations (Scopus)

Abstract

A new electrode structure with two additional middle-electrodes running in-between the interdigitated electrodes, is presented. With this structure, the voltage drops at these middle-electrodes are measured as well as the conductivity of a screen printed n-type WO3/TiO2 mixed oxide layer. The gas-sensing properties to NOx, CHx and CO are determined at 300 °C. It is shown that with this four-point structure, different sensor regions, namely the pure semiconducting layer and the interface electrode/semiconductor, can be separated and different gas-sensing properties can be determined for this regions. Additionally, by evaluating the signals at the middle-electrodes, single gases in gas mixtures can be detected and discriminated.

Original languageEnglish
Pages (from-to)503-508
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume93
Issue number1-3
DOIs
Publication statusPublished - Aug 1 2003
EventProceedings of the Ninth International Meeting on Chemical Engineering - Boston, MA, United States
Duration: Jul 7 2003Jul 10 2003

Keywords

  • Air quality sensor
  • Four-point structure
  • Selectivity enhancement
  • Titanium oxide
  • Tungsten oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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