Segregation of impurities due to pulsed laser beam annealing

I. B. Khaibullin, E. I. Shtyrkov, R. M. Bayazitov, R. A. Aganov, T. Lohner, G. Mezey, F. Pászti, A. Manuaba, E. Kótai, J. Gyulai

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A simple theory of the redistribution and segregation of the solutes which occur during the solidification after pulsed laser beam annealing is presented. For experimental verification, the laser processing of Bi+ implants at different doses was investigated by backscattering spectroscopy and a qualitative agreement between the experimental and calculated values was found.

Original languageEnglish
Pages (from-to)397-400
Number of pages4
JournalNuclear Instruments and Methods In Physics Research
Volume199
Issue number1-2
DOIs
Publication statusPublished - Aug 1 1982

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Backscattering
Pulsed lasers
Laser beams
Solidification
Spectroscopy
Annealing
Impurities
Lasers
Processing

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Segregation of impurities due to pulsed laser beam annealing. / Khaibullin, I. B.; Shtyrkov, E. I.; Bayazitov, R. M.; Aganov, R. A.; Lohner, T.; Mezey, G.; Pászti, F.; Manuaba, A.; Kótai, E.; Gyulai, J.

In: Nuclear Instruments and Methods In Physics Research, Vol. 199, No. 1-2, 01.08.1982, p. 397-400.

Research output: Contribution to journalArticle

Khaibullin, IB, Shtyrkov, EI, Bayazitov, RM, Aganov, RA, Lohner, T, Mezey, G, Pászti, F, Manuaba, A, Kótai, E & Gyulai, J 1982, 'Segregation of impurities due to pulsed laser beam annealing', Nuclear Instruments and Methods In Physics Research, vol. 199, no. 1-2, pp. 397-400. https://doi.org/10.1016/0167-5087(82)90242-3
Khaibullin, I. B. ; Shtyrkov, E. I. ; Bayazitov, R. M. ; Aganov, R. A. ; Lohner, T. ; Mezey, G. ; Pászti, F. ; Manuaba, A. ; Kótai, E. ; Gyulai, J. / Segregation of impurities due to pulsed laser beam annealing. In: Nuclear Instruments and Methods In Physics Research. 1982 ; Vol. 199, No. 1-2. pp. 397-400.
@article{bb04460a8ec0421193ed3f977aba2c73,
title = "Segregation of impurities due to pulsed laser beam annealing",
abstract = "A simple theory of the redistribution and segregation of the solutes which occur during the solidification after pulsed laser beam annealing is presented. For experimental verification, the laser processing of Bi+ implants at different doses was investigated by backscattering spectroscopy and a qualitative agreement between the experimental and calculated values was found.",
author = "Khaibullin, {I. B.} and Shtyrkov, {E. I.} and Bayazitov, {R. M.} and Aganov, {R. A.} and T. Lohner and G. Mezey and F. P{\'a}szti and A. Manuaba and E. K{\'o}tai and J. Gyulai",
year = "1982",
month = "8",
day = "1",
doi = "10.1016/0167-5087(82)90242-3",
language = "English",
volume = "199",
pages = "397--400",
journal = "Nuclear Instruments and Methods In Physics Research",
issn = "0167-5087",
publisher = "North-Holland Publ Co",
number = "1-2",

}

TY - JOUR

T1 - Segregation of impurities due to pulsed laser beam annealing

AU - Khaibullin, I. B.

AU - Shtyrkov, E. I.

AU - Bayazitov, R. M.

AU - Aganov, R. A.

AU - Lohner, T.

AU - Mezey, G.

AU - Pászti, F.

AU - Manuaba, A.

AU - Kótai, E.

AU - Gyulai, J.

PY - 1982/8/1

Y1 - 1982/8/1

N2 - A simple theory of the redistribution and segregation of the solutes which occur during the solidification after pulsed laser beam annealing is presented. For experimental verification, the laser processing of Bi+ implants at different doses was investigated by backscattering spectroscopy and a qualitative agreement between the experimental and calculated values was found.

AB - A simple theory of the redistribution and segregation of the solutes which occur during the solidification after pulsed laser beam annealing is presented. For experimental verification, the laser processing of Bi+ implants at different doses was investigated by backscattering spectroscopy and a qualitative agreement between the experimental and calculated values was found.

UR - http://www.scopus.com/inward/record.url?scp=49049139487&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=49049139487&partnerID=8YFLogxK

U2 - 10.1016/0167-5087(82)90242-3

DO - 10.1016/0167-5087(82)90242-3

M3 - Article

AN - SCOPUS:1042278449

VL - 199

SP - 397

EP - 400

JO - Nuclear Instruments and Methods In Physics Research

JF - Nuclear Instruments and Methods In Physics Research

SN - 0167-5087

IS - 1-2

ER -