SCRATCH-PROFILES STUDY IN THIN FILMS USING SEM AND EDS.

M. El-Shabasy, L. Pogány, G. Konczos, E. Hajto, B. Szikora

Research output: Contribution to journalArticle

Abstract

The adhesion of evaporated or sputtered thin films to substrates is one of the most important characterizing parameters in their fabrication. It is a conventional method to scratch the films using a stylus and evaluate the shearing stress, which is proportional to the energy of adhesion. For the evaluation it is necessary to determine the so-called critical load and the profile of the scratch. The aim during aim experimental work was to find a method to evaluate the scratch profile from the X-ray-line profile and SEM pictures. From SEM pictures, the lateral dimensions and surface morphology of the scratches were studied. The thickness was also studied from X-ray-line profiles. In this paper the thickness profile measuring method and the conclusion for the scratch method are discussed.

Original languageEnglish
Pages (from-to)237-241
Number of pages5
JournalElectrocomponent Science and Technology
Volume11
Issue number3
Publication statusPublished - May 1984

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Energy dispersive spectroscopy
Adhesion
X rays
Thin films
Scanning electron microscopy
Shearing
Surface morphology
Fabrication
Substrates

ASJC Scopus subject areas

  • Engineering(all)

Cite this

El-Shabasy, M., Pogány, L., Konczos, G., Hajto, E., & Szikora, B. (1984). SCRATCH-PROFILES STUDY IN THIN FILMS USING SEM AND EDS. Electrocomponent Science and Technology, 11(3), 237-241.

SCRATCH-PROFILES STUDY IN THIN FILMS USING SEM AND EDS. / El-Shabasy, M.; Pogány, L.; Konczos, G.; Hajto, E.; Szikora, B.

In: Electrocomponent Science and Technology, Vol. 11, No. 3, 05.1984, p. 237-241.

Research output: Contribution to journalArticle

El-Shabasy, M, Pogány, L, Konczos, G, Hajto, E & Szikora, B 1984, 'SCRATCH-PROFILES STUDY IN THIN FILMS USING SEM AND EDS.', Electrocomponent Science and Technology, vol. 11, no. 3, pp. 237-241.
El-Shabasy M, Pogány L, Konczos G, Hajto E, Szikora B. SCRATCH-PROFILES STUDY IN THIN FILMS USING SEM AND EDS. Electrocomponent Science and Technology. 1984 May;11(3):237-241.
El-Shabasy, M. ; Pogány, L. ; Konczos, G. ; Hajto, E. ; Szikora, B. / SCRATCH-PROFILES STUDY IN THIN FILMS USING SEM AND EDS. In: Electrocomponent Science and Technology. 1984 ; Vol. 11, No. 3. pp. 237-241.
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