Scheduling of automated wet-etch stations

Máté Hegyháti, Olivér Osz, Balázs Kovács, F. Friedler

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Semiconductor manufacturing has recently attracted an increased attention in process optimization research. Various MILP and constraint programming methods were published to solve the scheduling problem arising in the wet-etching systems. In the present work, improvements are given to these state-of-the-art models, furthermore, the general purpose solver of the S-graph framework (Sanmartí et al. 2002) is applied to wet-etch station scheduling..

Original languageEnglish
Pages (from-to)433-438
Number of pages6
JournalChemical Engineering Transactions
Volume39
Issue numberSpecial Issue
DOIs
Publication statusPublished - 2014

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Scheduling
Wet etching
Semiconductor materials

ASJC Scopus subject areas

  • Chemical Engineering(all)

Cite this

Scheduling of automated wet-etch stations. / Hegyháti, Máté; Osz, Olivér; Kovács, Balázs; Friedler, F.

In: Chemical Engineering Transactions, Vol. 39, No. Special Issue, 2014, p. 433-438.

Research output: Contribution to journalArticle

Hegyháti, M, Osz, O, Kovács, B & Friedler, F 2014, 'Scheduling of automated wet-etch stations', Chemical Engineering Transactions, vol. 39, no. Special Issue, pp. 433-438. https://doi.org/10.3303/CET1439073
Hegyháti, Máté ; Osz, Olivér ; Kovács, Balázs ; Friedler, F. / Scheduling of automated wet-etch stations. In: Chemical Engineering Transactions. 2014 ; Vol. 39, No. Special Issue. pp. 433-438.
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