Scheduling of automated wet-etch stations

Máté Hegyháti, Olivér Osz, Balázs Kovács, Ferenc Friedler

Research output: Contribution to journalConference article

2 Citations (Scopus)


Semiconductor manufacturing has recently attracted an increased attention in process optimization research. Various MILP and constraint programming methods were published to solve the scheduling problem arising in the wet-etching systems. In the present work, improvements are given to these state-of-the-art models, furthermore, the general purpose solver of the S-graph framework (Sanmartí et al. 2002) is applied to wet-etch station scheduling..

Original languageEnglish
Pages (from-to)433-438
Number of pages6
JournalChemical Engineering Transactions
Issue numberSpecial Issue
Publication statusPublished - Jan 1 2014
Event17th Conference on Process Integration, Modelling and Optimisation for Energy Saving and Pollution Reduction, PRES 2014 - Prague, Czech Republic
Duration: Aug 23 2014Aug 27 2014


ASJC Scopus subject areas

  • Chemical Engineering(all)

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