Scandium dipivaloyl methanate as a volatile precursor for thin film deposition. Coupling of mass spectrometer to thermobalance

K. Mészáros-Szécsényi, J. Päiväsaari, M. Putkonen, L. Niinistö, G. Pokol

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The coupling of a quadrupole mass spectrometer (QMS) via a heated capillary to a commercial thermogravimetric analyser is described. The amu and temperature ranges available were up to 1000 amu and 1500°C, respectively. The system was evaluated with test compounds, yielding gaseous species in the m/z range of 17-80, and then used for the study of thermal behaviour of scandium dipivaloyl methanate or Sc(thd)3 which is discussed in detail. Sc(thd)2 appears as the major Sc-containing species with m/z=411 in the gas phase at 200-300°C.

Original languageEnglish
Pages (from-to)65-75
Number of pages11
JournalJournal of Thermal Analysis and Calorimetry
Volume69
Issue number1
DOIs
Publication statusPublished - 2002

Keywords

  • ALD
  • CVD
  • Sc precursor
  • TG-MS
  • Thin films

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Fingerprint Dive into the research topics of 'Scandium dipivaloyl methanate as a volatile precursor for thin film deposition. Coupling of mass spectrometer to thermobalance'. Together they form a unique fingerprint.

  • Cite this