Room temperature pulsed laser deposition of Si x C thin films in different compositions

I. Hanyecz, J. Budai, A. Oszkó, E. Szilágyi, Z. Tóth

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Amorphous silicon-carbon alloy films in different compositions were prepared by pulsed laser deposition from two-component targets containing pure silicon and carbon parts. The silicon-carbon ratio in the films was varied by adjusting the number of laser shots on the constituent silicon and carbon targets. The composition, optical properties, thickness, and bonding structure of the films were determined by backscattering spectrometry, spectroscopic ellipsometry, and X-ray photoelectron spectroscopy, respectively. Backscattering spectrometry data were used to determine the deposition rate of silicon and carbon. This enabled the calculation of the number of the shots onto each target to reach a predefined composition. As the film composition changed from carbon to silicon, it was shown that the microscopic and macroscopic properties of the films also changed from a diamond-like carbon phase to an amorphous silicon phase via graphite- and silicon-carbide-like composite.

Original languageEnglish
Pages (from-to)1115-1121
Number of pages7
JournalApplied Physics A: Materials Science and Processing
Volume100
Issue number4
DOIs
Publication statusPublished - Sep 2010

Fingerprint

Pulsed laser deposition
pulsed laser deposition
Carbon
Silicon
Thin films
carbon
room temperature
thin films
Chemical analysis
silicon
Temperature
Backscattering
Amorphous silicon
Spectrometry
shot
amorphous silicon
backscattering
Diamond
Graphite
Spectroscopic ellipsometry

ASJC Scopus subject areas

  • Materials Science(all)
  • Chemistry(all)

Cite this

Room temperature pulsed laser deposition of Si x C thin films in different compositions. / Hanyecz, I.; Budai, J.; Oszkó, A.; Szilágyi, E.; Tóth, Z.

In: Applied Physics A: Materials Science and Processing, Vol. 100, No. 4, 09.2010, p. 1115-1121.

Research output: Contribution to journalArticle

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