The species density distributions in a large post-discharge reactor placed downstream from a flowing microwave discharge in N2-O2 are calculated using a three-dimensional hydrodynamic model. The effects of surface losses of N(4S) and O(3P) atoms on the density distributions of different species in the reactor are investigated for three different wall materials: (i) Pyrex, (ii) aluminium and (iii) stainless steel. The effects produced by considering different surface loss probabilities corresponding to each one of these materials, as well as by assuming the production of NO from the wall, are evaluated and discussed. The simulation is conducted for the case of a 65 × 25 × 25 cm3 post-discharge reactor fed from a 2450 MHz discharge, at 2 Torr and 2 × 103 sccm flow rate, in an N2-xO2 mixture composition, with x ≤ 0.5-7%.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films