Role of condensation phenomena in the measurement of film thickness by the oscillating quartz crystal method

J. Bakos, Gy Nagy, J. Szigeti

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The deposition of thin layers of ZnS and MgF2 on each other and on a glass surface was studied. The rate of evaporation, the film thickness, and the reflection of the layers were measured simultaneously. Condensation effects were found to influence the formation of layers on different substrates, a fact which has to be taken into account in measurements using the oscillating quartz crystal technique.

Original languageEnglish
Pages (from-to)4433-4436
Number of pages4
JournalJournal of Applied Physics
Volume37
Issue number12
DOIs
Publication statusPublished - Dec 1 1966

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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