Resolution correction in EELS

J. Tóth, D. Varga, I. Cserny, L. Kövér, B. Gruzza, D. Zeze, C. Jardin, G. Gergely

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Correction for inelastically scattered electrons is important in determining intensities in elastic peak electron spectroscopy (EPES), e.g. for obtaining information on in elastic mean free paths in the material, relevant parameters in quantitative applications of electron spectroscopy. The spectral shape of electron energy loss spectra depends more strongly on the spectrometer function in the elastic peak region, than in the continuous energy part. Therefore the resolution correction of the EELS spectra results in a considerable change of the spectral shape. The importance and the role of this correction is demonstrated in the case of REELS of Ni sample comparing the shapes of EELS spectra measured at different energy resolutions using different type spectrometers : (1) home-made HSA (ESA 31). Debrecen ; (2) home-made HSA (Clermont Ferrand) ; (3) CMA MAC2 by CAMECA-RIBER and a HSA (Lyon) ; (4) CMA OPC105 type by RIBER (Budapest).

Original languageEnglish
Pages (from-to)473-479
Number of pages7
JournalVacuum
Volume50
Issue number3-4
Publication statusPublished - Jul 1 1998

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Electron spectroscopy
Electron energy loss spectroscopy
Spectrometers
electron spectroscopy
Electrons
spectrometers
Energy dissipation
European Space Agency
mean free path
energy dissipation
electron energy
energy
electrons

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Tóth, J., Varga, D., Cserny, I., Kövér, L., Gruzza, B., Zeze, D., ... Gergely, G. (1998). Resolution correction in EELS. Vacuum, 50(3-4), 473-479.

Resolution correction in EELS. / Tóth, J.; Varga, D.; Cserny, I.; Kövér, L.; Gruzza, B.; Zeze, D.; Jardin, C.; Gergely, G.

In: Vacuum, Vol. 50, No. 3-4, 01.07.1998, p. 473-479.

Research output: Contribution to journalArticle

Tóth, J, Varga, D, Cserny, I, Kövér, L, Gruzza, B, Zeze, D, Jardin, C & Gergely, G 1998, 'Resolution correction in EELS', Vacuum, vol. 50, no. 3-4, pp. 473-479.
Tóth J, Varga D, Cserny I, Kövér L, Gruzza B, Zeze D et al. Resolution correction in EELS. Vacuum. 1998 Jul 1;50(3-4):473-479.
Tóth, J. ; Varga, D. ; Cserny, I. ; Kövér, L. ; Gruzza, B. ; Zeze, D. ; Jardin, C. ; Gergely, G. / Resolution correction in EELS. In: Vacuum. 1998 ; Vol. 50, No. 3-4. pp. 473-479.
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