Reliability of micromachined catalytic gas sensors

Aaron Norman, Frank Stam, Csaba Dücso

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

This work reports on the reliability testing of micromachined hotplates designed for calorimetric gas sensors. The devices consist of a platinum resistive heater on a silicon nitride substrate under which polysilicon has been etched. The devices have proprietary catalysts deposited onto the surface prior to reliability testing. Environmental, mechanical and electrical tests were performed on the devices. IR thermography work is described to demonstrate device processing issues as observed during some reliability tests. In general devices showed good mechanical stability, but the catalytic material deposited on the sensors showed some problems.

Original languageEnglish
Pages1310-1313
Number of pages4
Publication statusPublished - Dec 1 2003
EventSecond IEEE International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada
Duration: Oct 22 2003Oct 24 2003

Conference

ConferenceSecond IEEE International Conference on Sensors: IEEE Sensors 2003
CountryCanada
CityToronto, Ont.
Period10/22/0310/24/03

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Keywords

  • Catalytic
  • Gas sensor
  • Hotplate
  • Micromachined

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Norman, A., Stam, F., & Dücso, C. (2003). Reliability of micromachined catalytic gas sensors. 1310-1313. Paper presented at Second IEEE International Conference on Sensors: IEEE Sensors 2003, Toronto, Ont., Canada.