REFLECTION ELECTRON ENERGY LOSS SPECTROSCOPY (REELS) OF SOME OXIDE FILMS ON SUBSTRATES.

Research output: Contribution to journalConference article

Abstract

REELS of thin oxide films on aluminum and silicon substrates has been done making use of elastic peak electron spectroscopy. In recent work, experimental evidence proved the dominant role of the two process model in REELS. The core level loss peak consists of inelastic scattering (IS) and elastic reflection (ER) processes: IS plus ER or ER plus IS within the thin film, IS in the film and ER in the substrate, before or after the loss event. The analysis is given of these processes, deducing formulas for evaluating REELS experimental results. The elastic peak consists of ER within the film and the substrate. Experiments have been carried out with a Riber OPC 103 CMA-lock in-on line computer system. Theoretical and experimental results vs the E primary electron energy are presented.

Original languageEnglish
Number of pages1
JournalVacuum
Volume37
Issue number1-2
Publication statusPublished - Jan 1 1987
EventHung-Austrian-Yugosl Third Jt Vac Conf - Debrecen, Hung
Duration: Oct 7 1985Oct 9 1985

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ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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