Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared

H. Albers, L. T H Hilderink, E. Szilágyi, F. Pászti, P. V. Lambeck, Th J A Popma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

The hydrogen in PECVD-SiOxNy is studied with IR spectroscopy and ERD analysis as function of the O/N ratio and the annealing treatment up to 1150°C. The results are compared with measured spectral waveguide losses. The results show that low loss PECVD-SiOxNy waveguides for use in telecommunication applications are possible in spite of the high initial hydrogen concentration in these films.

Original languageEnglish
Title of host publicationConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
PublisherIEEE
Pages88-89
Number of pages2
Volume2
Publication statusPublished - 1995
EventProceedings of the 1995 8th Annual Meeting of the IEEE Lasers and Electro-Optics Society. Part 1 (of 2) - San Francisco, CA, USA
Duration: Oct 30 1995Nov 2 1995

Other

OtherProceedings of the 1995 8th Annual Meeting of the IEEE Lasers and Electro-Optics Society. Part 1 (of 2)
CitySan Francisco, CA, USA
Period10/30/9511/2/95

Fingerprint

Optical waveguides
Plasma enhanced chemical vapor deposition
Electric losses
Infrared radiation
Hydrogen
Telecommunication
Infrared spectroscopy
Waveguides
Annealing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering

Cite this

Albers, H., Hilderink, L. T. H., Szilágyi, E., Pászti, F., Lambeck, P. V., & Popma, T. J. A. (1995). Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. In Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS (Vol. 2, pp. 88-89). IEEE.

Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. / Albers, H.; Hilderink, L. T H; Szilágyi, E.; Pászti, F.; Lambeck, P. V.; Popma, Th J A.

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. Vol. 2 IEEE, 1995. p. 88-89.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Albers, H, Hilderink, LTH, Szilágyi, E, Pászti, F, Lambeck, PV & Popma, TJA 1995, Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. in Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. vol. 2, IEEE, pp. 88-89, Proceedings of the 1995 8th Annual Meeting of the IEEE Lasers and Electro-Optics Society. Part 1 (of 2), San Francisco, CA, USA, 10/30/95.
Albers H, Hilderink LTH, Szilágyi E, Pászti F, Lambeck PV, Popma TJA. Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. In Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. Vol. 2. IEEE. 1995. p. 88-89
Albers, H. ; Hilderink, L. T H ; Szilágyi, E. ; Pászti, F. ; Lambeck, P. V. ; Popma, Th J A. / Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. Vol. 2 IEEE, 1995. pp. 88-89
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