Reconstruction of low-count step-like signals in ion microbeam analysis

Miklós Kovács, Zoltán Kántor, Alíz Simon, Krisztina Frey

Research output: Contribution to journalArticle


The evaluation of experimental data of ion microbeam analysis is often hindered by low counts/pixel statistics of elemental or tomographic images available within limited acquisition time, mainly at low elemental concentrations. In this contribution we present a method based on a non-linear iterative deconvolution scheme, designed to recover step-like profiles with forcibly low counts. To demonstrate its performance and effectiveness, the algorithm was applied for measured one-dimensional profiles with a micrometre resolution, generated by Rutherford backscattering spectrometry (μRBS) at the ATOMKI scanning nuclear microprobe facility. The method can be extended to solve the analogous two-dimensional problem, giving an improvement of nuclear microscopic methods, like channelling contrast microscopy (CCM).

Original languageEnglish
Pages (from-to)53-57
Number of pages5
Issue number1-2 SPEC.
Publication statusPublished - May 9 2003


  • Ion beam analysis (IBA)
  • Microbeam
  • Non-linear deconvolution
  • Rutherford backscattering spectrometry (RBS)
  • Signal processing

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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