Recent progress in ion beam fabrication of integrated optical elements

I. Banyasz, G. U.L. Nagy, V. Havranek, V. Vosecek, E. Agocs, M. Fried, V. Rakovics, S. Pelli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Planar optical waveguides and Bragg gratings were designed and written in various optical crystals with medium energy ion implantation. Some examples of the fabricated integrated optical elements are presented in this article: Planar optical waveguides fabricated in Er: LiNbO3 crystal by irradiation with 5 MeV N3+ ions, and Bragg gratings fabricated by multi-energy implantation into a silicon substrate with N+ ions in the 800 keV - 3.5 MeV energy range. The SRIM code was used for planning the optical elements. The ion implanted optical elements were tested by spectroscopic ellipsometry and visible and infrared reflectometry. The results show that the proposed fabrication methods can produce integrated optical elements of adequate parameters.

Original languageEnglish
Title of host publicationICTON 2017 - 19th International Conference on Transparent Optical Networks
PublisherIEEE Computer Society
ISBN (Electronic)9781538608586
DOIs
Publication statusPublished - Sep 1 2017
Event19th International Conference on Transparent Optical Networks, ICTON 2017 - Girona, Catalonia, Spain
Duration: Jul 2 2017Jul 6 2017

Other

Other19th International Conference on Transparent Optical Networks, ICTON 2017
CountrySpain
CityGirona, Catalonia
Period7/2/177/6/17

Keywords

  • lanar optical waveguide
  • nfrared reflectometry
  • ntegrated optics
  • on implantation
  • pectroscopic ellipsometry
  • ptical Bragg grating

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Banyasz, I., Nagy, G. U. L., Havranek, V., Vosecek, V., Agocs, E., Fried, M., Rakovics, V., & Pelli, S. (2017). Recent progress in ion beam fabrication of integrated optical elements. In ICTON 2017 - 19th International Conference on Transparent Optical Networks [8024871] IEEE Computer Society. https://doi.org/10.1109/ICTON.2017.8024871