Realization of a new sensor concept: Improved CCFET and SGFET type gas sensors in Hybrid Flip-Chip technology

R. Pohle, E. Simon, R. Schneider, M. Fleischer, H. Meixner, H. P. Frerichs, M. Lehmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

A wide range of emerging applications in the consumer sector is envisioned for low-cost gas sensors with a high degree of adaptability to special measuring applications. The readout of gas induced work function changes via hybrid suspended gate field effect devices is already accepted as a promising technique for the realisation of a versatile, low-cost sensor platform. However, the industrialisation is still in the beginning. We report the realisation of the innovative, cheaply manufacturable Hybrid Flip-Chip (HFCFET) setup which was introduced. Using different modifications of improved ISFET and CCFET type transducers we compare the performance of these readout devices. Additionally, the design of the readout structures was improved compared to other reported devices. Profiting from the use of a standard CMOS process an analogue readout circuit was integrated in a CCFET type transducer enabling an on-chip reference and compensation of signal drifts.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages135-138
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - Jan 1 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

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Keywords

  • CMOS process
  • Conducting materials
  • Costs
  • Energy consumption
  • FETs
  • Flip chip
  • Gas detectors
  • Manufacturing industries
  • Transducers
  • Voltage

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Pohle, R., Simon, E., Schneider, R., Fleischer, M., Meixner, H., Frerichs, H. P., & Lehmann, M. (2003). Realization of a new sensor concept: Improved CCFET and SGFET type gas sensors in Hybrid Flip-Chip technology. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 135-138). [1215271] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215271