Realisation of quantitative Makyoh topography using a digital micromirror device

Ferenc Riesz, I. E. Lukács, J. P. Makai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Makyoh topography (MT) is an optical characterisation tool for flatness testing of mirror-like surfaces. In MT, the surface is illuminated by a collimated light beam, and the reflected image is detected on a screen placed some distance away from the sample. Because of the focussing/defocussing action of the surface undulaations, the image shows intensity variations related to the sample morphology. In its original form, MT is qualitative only. By inserting a structured mask (e.g., a grid) into the path of the illuminating beam, the surface topography can be calculated by the integration of the gradients obtained by the determination of the displacements of the grid node positions, compared to a reference flat, similarly to a wavefront sensor. A DMD provides an easy and verstile way of realisation of such a structured mask. In this paper, we report on a quantitative MT set-up using a programmed DMD. Possibilities of the realisation of different mask patterns are analysed. The results are compared to interferometry.

Original languageEnglish
Title of host publicationOptical Measurement Systems for Industrial Inspection V
EditionPART 1
DOIs
Publication statusPublished - Nov 23 2007
EventOptical Measurement Systems for Industrial Inspection V - Munich, Germany
Duration: Jun 18 2007Jun 22 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
NumberPART 1
Volume6616
ISSN (Print)0277-786X

Other

OtherOptical Measurement Systems for Industrial Inspection V
CountryGermany
CityMunich
Period6/18/076/22/07

Keywords

  • Digital micromirror device
  • Full-field optical characterisation techniques
  • Makyoh topography
  • Structured illumination
  • Surface flatness
  • Surface morphology

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Riesz, F., Lukács, I. E., & Makai, J. P. (2007). Realisation of quantitative Makyoh topography using a digital micromirror device. In Optical Measurement Systems for Industrial Inspection V (PART 1 ed.). [66160L] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6616, No. PART 1). https://doi.org/10.1117/12.726388