RBS-channeling and EPR studies of damage in 2 MeV Al2+-implanted 6H-SiC substrates

Y. Morilla, J. García López, G. Battistig, J. L. Cantin, J. C. Cheang-Wong, H. J. Von Bardeleben, M. A. Respaldiza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy