RBS and XHRTEM characterization of epitaxial Ni films prepared by biased d.c. sputter deposition on MgO(001)

Hisashi Nakai, Hong Qiu, M. Adamik, G. Sáfrán, P. Barna, Mituru Hashimoto

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

Rutherford backscattering spectrometry (RBS) channelling and cross-sectional high-resolution transmission electron microscopy (XHRTEM) have been applied to characterize the structure of Ni films grown epitaxially on MgO(001) by biased d.c. sputter deposition. The RBS spectra indicate that the Ni films have a high density of lattice imperfections near to the MgO surface. The XHRTEM investigations revealed a lattice expansion in the [010]direction confirming the existence of the slightly distorted cubic lattice of Ni in the vicinity of the substrate surface which was detected by RBS channelling measurements. Regularly distributed edge dislocations due to the mismatch of Ni and MgO lattices have been clearly demonstrated by XHRTEM.

Original languageEnglish
Pages (from-to)159-161
Number of pages3
JournalThin Solid Films
Volume263
Issue number2
DOIs
Publication statusPublished - Jul 15 1995

Fingerprint

Sputter deposition
Rutherford backscattering spectroscopy
Spectrometry
backscattering
spectroscopy
Edge dislocations
edge dislocations
cubic lattices
High resolution transmission electron microscopy
crystal defects
Defects
transmission electron microscopy
expansion
high resolution
Substrates

Keywords

  • Epitaxy
  • Nickel
  • Rutherford backscattering spectroscopy
  • sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Condensed Matter Physics

Cite this

RBS and XHRTEM characterization of epitaxial Ni films prepared by biased d.c. sputter deposition on MgO(001). / Nakai, Hisashi; Qiu, Hong; Adamik, M.; Sáfrán, G.; Barna, P.; Hashimoto, Mituru.

In: Thin Solid Films, Vol. 263, No. 2, 15.07.1995, p. 159-161.

Research output: Contribution to journalArticle

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AU - Barna, P.

AU - Hashimoto, Mituru

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