Raman spectroscopic study of magnetron sputtered carbon-nickel and carbon nitride-nickel composite films: The effect of nickel on the atomic structure of the C/CNx matrix

Gy J. Kovács, M. Veres, M. Koós, G. Radnóczi

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Carbon (C), carbon nitride (CNx), C-nickel and CNx-nickel films were deposited by direct current magnetron sputtering onto oxidized (100) Si substrates, at 25, 200, and 500 °C growth temperatures. Raman spectroscopy was used to examine the bonding structure of C and CNx, and to investigate the effect of the Ni dispersed phase on the atomic structure of the C or CNx matrix of composite films. The atomic structure of the matrix is different for the C-Ni and for the CNx-Ni films. In the C and C-Ni films graphene-like sp2-ordering, in the CNx and CNx-Ni films fullerene-like sp2-ordering was found. For both types of composite films, the presence of the dispersed phase enhances the sp2-ordering of the matrix.

Original languageEnglish
Pages (from-to)7910-7915
Number of pages6
JournalThin Solid Films
Volume516
Issue number21
DOIs
Publication statusPublished - Sep 1 2008

Keywords

  • Carbon nitride-metal composite films
  • Carbon-metal composite films
  • Fullerene-like structures
  • Raman spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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