The paper presents the design, modelling and manufacturing of a new type of MMIC, a nonlinear transmission line monolithically integrated in a CPW based on GaAs. This device is the key element of the quasi-optical THz instrumentation that will be further developed. A low cost four mask technological process and manufacturing is presented.
|Number of pages||6|
|Journal||International Workshop on Integrated Nonlinear Microwave and Millimeterwave Circuits|
|Publication status||Published - 1994|
|Event||Proceedings of the 3rd International Workshop on Integrated Nonlinear Microwave and Millimeterwave Circuits - Duisburg, Ger|
Duration: Oct 5 1994 → Oct 7 1994
ASJC Scopus subject areas
- Electrical and Electronic Engineering