Quantitative approach to Makyoh (magic-mirror) topography

Research output: Contribution to journalConference article

10 Citations (Scopus)

Abstract

A simple geometrical optical model for the image formation in Makyoh-topography is presented. Fundamental properties of the image formation are established and the basic principles are demonstrated using simulated and experimental Makyoh images. Computer simulations of the image of a periodic surface and experimental images of a Si wafer are presented to demonstrate the main points of the model.

Original languageEnglish
Pages (from-to)370-374
Number of pages5
JournalJournal of Crystal Growth
Volume210
Issue number1
DOIs
Publication statusPublished - Mar 1 2000
Event8th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors - Narita, Jpn
Duration: Sep 15 1999Sep 18 1999

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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