Pulsed laser deposition of nanostructured indium-tin-oxide film

Thian Kok Yong, Chen Hon Nee, Seong Shan Yap, Wee Ong Siew, György Sáfran, Yoke Kin Yap, Teck Yong Tou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


Effects of O2, N2, Ar and He on the formation of micro- and nanostructured indium tin oxide (ITO) thin films were investigated in pulsed Nd:YAG laser deposition on glass substrate. For O2 and Ar, ITO resistivity of ≤ 4 × 10-4 Ωcm and optical transmittance of > 90% were obtained with substrate temperature of 250 °C. For N2 and He, low ITO resisitivity could be obtained but with poor optical transmittance. SEM images show nano-structured ITO thin films for all gases, where dense, larger and highly oriented, microcrystalline structures were obtained for deposition in O2 and He, as revealed from the XRD lines. EDX results indicated the inclusion of Ar and N2 at the expense of reduced tin (Sn) content. When the ITO films were applied for fabrication of organic light emitting devices (OLED), only those deposited in Ar and O2 produced comparable performance to single-layer OLED fabricated on the commercial ITO.

Original languageEnglish
Title of host publicationNanostructured Thin Films III
Publication statusPublished - Oct 28 2010
EventNanostructured Thin Films III - San Diego, CA, United States
Duration: Aug 4 2010Aug 5 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherNanostructured Thin Films III
CountryUnited States
CitySan Diego, CA


  • Indium-tin-oxide (ITO)
  • Nanorod
  • Nanostructures
  • Organic light emitting diode (OLED)
  • Pulsed laser deposition (PLD)
  • Transparent conducting oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Yong, T. K., Nee, C. H., Yap, S. S., Siew, W. O., Sáfran, G., Yap, Y. K., & Tou, T. Y. (2010). Pulsed laser deposition of nanostructured indium-tin-oxide film. In Nanostructured Thin Films III [776615] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7766). https://doi.org/10.1117/12.869561