Pulsed laser deposition of metals at target temperatures close to the melting point

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Abstract

Tin and bismuth metals are irradiated by KrF excimer laser pulses of fluences around 5 J/cm2. Supressing the formation of surface inhomogeneities on the target is achieved by increasing the target temperature to close to its melting point. The characteristics of surface structures developed on targets ablated at room temperature and heated to approximately 40°C below the melting point of the respective metal, are presented. Optical microscopy is used to follow the changes in the surface morphology of the deposited films, and especially in the surface number density of particulates. Approaching the melting point of the tin target resulted in a threefold decrease in surface number density of particulates, while for bismuth only a slight decrease was obtained. In the latter case, the anisotropic growth properties of bismuth precluded the effective smoothing of certain domains on the target surface, even at temperatures close to its melting point.

Original languageEnglish
JournalApplied Physics A: Materials Science and Processing
Volume69
Issue number7
DOIs
Publication statusPublished - 1999

Fingerprint

Pulsed laser deposition
Bismuth
pulsed laser deposition
melting points
Melting point
Metals
Tin
metals
bismuth
Temperature
particulates
temperature
tin
Excimer lasers
Surface structure
Optical microscopy
Surface morphology
Laser pulses
smoothing
excimer lasers

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

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title = "Pulsed laser deposition of metals at target temperatures close to the melting point",
abstract = "Tin and bismuth metals are irradiated by KrF excimer laser pulses of fluences around 5 J/cm2. Supressing the formation of surface inhomogeneities on the target is achieved by increasing the target temperature to close to its melting point. The characteristics of surface structures developed on targets ablated at room temperature and heated to approximately 40°C below the melting point of the respective metal, are presented. Optical microscopy is used to follow the changes in the surface morphology of the deposited films, and especially in the surface number density of particulates. Approaching the melting point of the tin target resulted in a threefold decrease in surface number density of particulates, while for bismuth only a slight decrease was obtained. In the latter case, the anisotropic growth properties of bismuth precluded the effective smoothing of certain domains on the target surface, even at temperatures close to its melting point.",
author = "Z. K{\'a}ntor and Z. Geretovszky and T. Sz{\"o}r{\'e}nyi",
year = "1999",
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T1 - Pulsed laser deposition of metals at target temperatures close to the melting point

AU - Kántor, Z.

AU - Geretovszky, Z.

AU - Szörényi, T.

PY - 1999

Y1 - 1999

N2 - Tin and bismuth metals are irradiated by KrF excimer laser pulses of fluences around 5 J/cm2. Supressing the formation of surface inhomogeneities on the target is achieved by increasing the target temperature to close to its melting point. The characteristics of surface structures developed on targets ablated at room temperature and heated to approximately 40°C below the melting point of the respective metal, are presented. Optical microscopy is used to follow the changes in the surface morphology of the deposited films, and especially in the surface number density of particulates. Approaching the melting point of the tin target resulted in a threefold decrease in surface number density of particulates, while for bismuth only a slight decrease was obtained. In the latter case, the anisotropic growth properties of bismuth precluded the effective smoothing of certain domains on the target surface, even at temperatures close to its melting point.

AB - Tin and bismuth metals are irradiated by KrF excimer laser pulses of fluences around 5 J/cm2. Supressing the formation of surface inhomogeneities on the target is achieved by increasing the target temperature to close to its melting point. The characteristics of surface structures developed on targets ablated at room temperature and heated to approximately 40°C below the melting point of the respective metal, are presented. Optical microscopy is used to follow the changes in the surface morphology of the deposited films, and especially in the surface number density of particulates. Approaching the melting point of the tin target resulted in a threefold decrease in surface number density of particulates, while for bismuth only a slight decrease was obtained. In the latter case, the anisotropic growth properties of bismuth precluded the effective smoothing of certain domains on the target surface, even at temperatures close to its melting point.

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