Pulsed laser deposition of a-CNx: H films: The role of target-to-substrate distance and laser fluence

P. González, R. Soto, B. León, M. Pérez-Amor, T. Szörényi

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The effect of the mean free path of the ablated species to the target-to-substrate distance ratio on chemical composition and growth rate of carbon nitride films is reported. The composition of the films deposited at room temperature by ablating a glassy carbon target with an ArF excimer laser (193 nm) in 0.3 Torr ammonia was determined by Fourier transform infrared spectroscopy. At fixed pulse energy, the nitrogen content of the films decreases while the hydrogen content remains practically constant with increasing target-to-substrate distance. When the deposition geometry is fixed, increasing pulse energy results in an increase in the nitrogen content.

Original languageEnglish
Pages (from-to)454-457
Number of pages4
JournalApplied Surface Science
Volume154
DOIs
Publication statusPublished - Feb 1 2000

Fingerprint

Pulsed laser deposition
pulsed laser deposition
fluence
Lasers
Substrates
Nitrogen
lasers
nitrogen
carbon nitrides
Carbon nitride
glassy carbon
Glassy carbon
Excimer lasers
pulses
Chemical analysis
Ammonia
mean free path
excimer lasers
Fourier transform infrared spectroscopy
ammonia

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Pulsed laser deposition of a-CNx : H films: The role of target-to-substrate distance and laser fluence. / González, P.; Soto, R.; León, B.; Pérez-Amor, M.; Szörényi, T.

In: Applied Surface Science, Vol. 154, 01.02.2000, p. 454-457.

Research output: Contribution to journalArticle

@article{d77c83b015b347efbfe0b9714d0e6965,
title = "Pulsed laser deposition of a-CNx: H films: The role of target-to-substrate distance and laser fluence",
abstract = "The effect of the mean free path of the ablated species to the target-to-substrate distance ratio on chemical composition and growth rate of carbon nitride films is reported. The composition of the films deposited at room temperature by ablating a glassy carbon target with an ArF excimer laser (193 nm) in 0.3 Torr ammonia was determined by Fourier transform infrared spectroscopy. At fixed pulse energy, the nitrogen content of the films decreases while the hydrogen content remains practically constant with increasing target-to-substrate distance. When the deposition geometry is fixed, increasing pulse energy results in an increase in the nitrogen content.",
author = "P. Gonz{\'a}lez and R. Soto and B. Le{\'o}n and M. P{\'e}rez-Amor and T. Sz{\"o}r{\'e}nyi",
year = "2000",
month = "2",
day = "1",
doi = "10.1016/S0169-4332(99)00394-3",
language = "English",
volume = "154",
pages = "454--457",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",

}

TY - JOUR

T1 - Pulsed laser deposition of a-CNx

T2 - H films: The role of target-to-substrate distance and laser fluence

AU - González, P.

AU - Soto, R.

AU - León, B.

AU - Pérez-Amor, M.

AU - Szörényi, T.

PY - 2000/2/1

Y1 - 2000/2/1

N2 - The effect of the mean free path of the ablated species to the target-to-substrate distance ratio on chemical composition and growth rate of carbon nitride films is reported. The composition of the films deposited at room temperature by ablating a glassy carbon target with an ArF excimer laser (193 nm) in 0.3 Torr ammonia was determined by Fourier transform infrared spectroscopy. At fixed pulse energy, the nitrogen content of the films decreases while the hydrogen content remains practically constant with increasing target-to-substrate distance. When the deposition geometry is fixed, increasing pulse energy results in an increase in the nitrogen content.

AB - The effect of the mean free path of the ablated species to the target-to-substrate distance ratio on chemical composition and growth rate of carbon nitride films is reported. The composition of the films deposited at room temperature by ablating a glassy carbon target with an ArF excimer laser (193 nm) in 0.3 Torr ammonia was determined by Fourier transform infrared spectroscopy. At fixed pulse energy, the nitrogen content of the films decreases while the hydrogen content remains practically constant with increasing target-to-substrate distance. When the deposition geometry is fixed, increasing pulse energy results in an increase in the nitrogen content.

UR - http://www.scopus.com/inward/record.url?scp=0343953439&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0343953439&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(99)00394-3

DO - 10.1016/S0169-4332(99)00394-3

M3 - Article

AN - SCOPUS:0343953439

VL - 154

SP - 454

EP - 457

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -