Pulsed laser deposition from solid and molten metals

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Abstract

Can particulates formation in general be avoided by using liquid targets, or only can particulates deposition be suppressed by choosing appropriate experimental circumstances? In order to answer this question, which is of general importance in pulsed laser deposition, we deposited indium, tin and bismuth films from the respective metal targets both in solid and liquid form, in vacuum. The substrates were held at room-temperature, in order to collect and preserve the droplets if formed. Ablating molten targets, the appearance of droplets of diameter exceeding microns can completely be eliminated. The particulates number density of indium and tin films decreased by two orders of magnitude as compared to the solid-target case. However, even in these cases, particulates formation could not be totally eliminated. The thickness distribution of the film material becomes broader when deposited from molten target.

Original languageEnglish
Pages (from-to)275-279
Number of pages5
JournalApplied Surface Science
Volume138-139
Issue number1-4
DOIs
Publication statusPublished - Jan 1999

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Keywords

  • Laser beam applications
  • PLD
  • Pulsed laser deposition
  • Thin film deposition

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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