Pulsed laser ablation mechanisms of thin metal films

Z. Tóth, B. Hopp, T. Szörényi, Z. Bor, Elena A. Shakhno, Vadim P. Veiko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

The ablation of thin films by single laser pulses is a well known technique with widespread industrial applications. Ablation occurs in a well defined power density region if a supported thin film is illuminated by a single laser pulse. In the literature there are a number of theoretical description of ablation, but a very few based on in-situ experiments. In our study we have directly visualized the ablation processes with fast photography based on application of dye laser probe pulses. The ablation of chromium and tungsten layers supported onto glass substrates with pulses of ArF excimer laser was investigated. The ablated area was illuminated by a delayed short pulse of a fluorescein dye laser or a Rhodamine6G dye laser. Snapshots of initial phase of ablation and the forthcoming material transport were recorded by an optical system and a video camera. Blowing-off mechanisms and thermo-mechanical mechanisms are considered to take place during ablation. Pressures formed during laser ablation were calculated and compared with experimental data. It was found that thermo-desorption of gas adsorbed on to the substrate surface, substrate material evaporation and film exfoliation by its longitudinal thermal enlargement may be acting during laser ablation of thin films.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages18-26
Number of pages9
Volume3822
Publication statusPublished - 1999
EventProceedings of the 1999 Computer-Controlled Microshaping - Munich, Ger
Duration: Jun 16 1999Jun 18 1999

Other

OtherProceedings of the 1999 Computer-Controlled Microshaping
CityMunich, Ger
Period6/16/996/18/99

Fingerprint

Laser ablation
Ablation
Pulsed lasers
metal films
laser ablation
ablation
pulsed lasers
Laser pulses
Dye lasers
Metals
dye lasers
pulses
Thin films
Substrates
thin films
blowing
photography
Photography
Excimer lasers
Video cameras

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Tóth, Z., Hopp, B., Szörényi, T., Bor, Z., Shakhno, E. A., & Veiko, V. P. (1999). Pulsed laser ablation mechanisms of thin metal films. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3822, pp. 18-26). Society of Photo-Optical Instrumentation Engineers.

Pulsed laser ablation mechanisms of thin metal films. / Tóth, Z.; Hopp, B.; Szörényi, T.; Bor, Z.; Shakhno, Elena A.; Veiko, Vadim P.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3822 Society of Photo-Optical Instrumentation Engineers, 1999. p. 18-26.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tóth, Z, Hopp, B, Szörényi, T, Bor, Z, Shakhno, EA & Veiko, VP 1999, Pulsed laser ablation mechanisms of thin metal films. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3822, Society of Photo-Optical Instrumentation Engineers, pp. 18-26, Proceedings of the 1999 Computer-Controlled Microshaping, Munich, Ger, 6/16/99.
Tóth Z, Hopp B, Szörényi T, Bor Z, Shakhno EA, Veiko VP. Pulsed laser ablation mechanisms of thin metal films. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3822. Society of Photo-Optical Instrumentation Engineers. 1999. p. 18-26
Tóth, Z. ; Hopp, B. ; Szörényi, T. ; Bor, Z. ; Shakhno, Elena A. ; Veiko, Vadim P. / Pulsed laser ablation mechanisms of thin metal films. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3822 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 18-26
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