Proton beam micromachined buried microchannels in negative tone resist materials

I. Rajta, M. Chatzichristidi, E. Baradács, C. Cserháti, I. Raptis, K. Manoli, E. S. Valamontes

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In the present work the Atomki, Debrecen microprobe facility has been used to write long tilted structures by 2 MeV protons. For the formation of the structures, two exposures have been carried out at +20° and -20° using a goniometer stage sample holder. The tilted structures were resolved in the negative tone resist materials SU-8 and ADEPR (an aqueous base developable chemically amplified resist). The length of the microchannels was varied between 100 μm and 1000 μm, the wall thickness was less than 10 μm. By applying the developed methodology it was possible to resolve the desired layout through the whole length of the channel.

Original languageEnglish
Pages (from-to)414-418
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume260
Issue number1
DOIs
Publication statusPublished - Jul 2007

Fingerprint

Goniometers
goniometers
Proton beams
holders
microchannels
Microchannels
proton beams
layouts
Protons
methodology
protons

Keywords

  • Chemically amplified resist
  • High aspect ratio technologies
  • Microchannel
  • Proton beam writing (PBW)
  • Tilted structure

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Proton beam micromachined buried microchannels in negative tone resist materials. / Rajta, I.; Chatzichristidi, M.; Baradács, E.; Cserháti, C.; Raptis, I.; Manoli, K.; Valamontes, E. S.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 260, No. 1, 07.2007, p. 414-418.

Research output: Contribution to journalArticle

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AU - Raptis, I.

AU - Manoli, K.

AU - Valamontes, E. S.

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