Proton Beam Effects on Ge–Se/Ag Thin Films

Tyler Nichol, Gyula Nagy, Robert Huszank, Dmitri Tenne, Michael N. Kozicki, Hugh J. Barnaby, Istvan Rajta, Maria Mitkova

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Among the many applications of chalcogenide glasses, their involvement as an active layer in redox-conductive-bridge-memory (CBRAM) devices triggers particular interest because of their potential to replace CMOS-based NAND and flash memory. In these devices the chalcogenide glass film is in contact with a silver film, and it is of a practical interest to understand how a beam of protons can influence this dual layer structure in order to identify how the performance of the CBRAM devices will be affected. In this work we studied the influence of proton beam irradiation over a Ge40Se60/Ag film stack. Various methods of analysis including scanning atomic force microscopy (AFM), Raman spectrometry, Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD), and X-ray photoelectron spectrometry (XPS) have been applied to study the structure, topography, composition, bonding configurations, diffusion kinetics, and molecular evolution of thin films related to the active sections of CBRAM devices, and quantitative analysis of material parameters and changes is reported. The results reveal silver surface deposition and germanium oxidation, as well as change in the films chemistry as a result of proton irradiation.

Original languageEnglish
Article number1700453
JournalPhysica Status Solidi (B) Basic Research
Volume255
Issue number6
DOIs
Publication statusPublished - Jun 2018

Keywords

  • chalcogenide glasses
  • conductive bridge random access memory
  • irradiation effects
  • memristors
  • proton irradiation
  • thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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  • Cite this

    Nichol, T., Nagy, G., Huszank, R., Tenne, D., Kozicki, M. N., Barnaby, H. J., Rajta, I., & Mitkova, M. (2018). Proton Beam Effects on Ge–Se/Ag Thin Films. Physica Status Solidi (B) Basic Research, 255(6), [1700453]. https://doi.org/10.1002/pssb.201700453