Proposal for a possible experimental arrangement of Auger-(AES) and core level ionization loss (ILS) coincidence spectroscopy in reflection mode (REELS)

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Abstract

A possible experimental arrangement is proposed to improve the detection of AES by AES-ILS coincidence spectroscopy. It is based on two MAC2 analysers. Criteria of coincidence spectroscopy in reflection mode are discussed, completing those described by Cazaux for transmission mode and considering the energy resolution, sampling depth, angle of incidence and detection. For reflection mode glancing incidence of primary electrons and low take off angle of ILS electrons are favourable. The angles are optimized by adjusting the electron gun position and by tilting the sample. A rough estimation of coincidence on a sample Ag trace on Si substrate is given.

Original languageEnglish
Pages (from-to)47-50
Number of pages4
JournalActa Physica Hungarica
Volume70
Issue number1-2
DOIs
Publication statusPublished - Jun 1991

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proposals
ionization
incidence
spectroscopy
takeoff
electron guns
electrons
adjusting
sampling
energy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

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abstract = "A possible experimental arrangement is proposed to improve the detection of AES by AES-ILS coincidence spectroscopy. It is based on two MAC2 analysers. Criteria of coincidence spectroscopy in reflection mode are discussed, completing those described by Cazaux for transmission mode and considering the energy resolution, sampling depth, angle of incidence and detection. For reflection mode glancing incidence of primary electrons and low take off angle of ILS electrons are favourable. The angles are optimized by adjusting the electron gun position and by tilting the sample. A rough estimation of coincidence on a sample Ag trace on Si substrate is given.",
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N2 - A possible experimental arrangement is proposed to improve the detection of AES by AES-ILS coincidence spectroscopy. It is based on two MAC2 analysers. Criteria of coincidence spectroscopy in reflection mode are discussed, completing those described by Cazaux for transmission mode and considering the energy resolution, sampling depth, angle of incidence and detection. For reflection mode glancing incidence of primary electrons and low take off angle of ILS electrons are favourable. The angles are optimized by adjusting the electron gun position and by tilting the sample. A rough estimation of coincidence on a sample Ag trace on Si substrate is given.

AB - A possible experimental arrangement is proposed to improve the detection of AES by AES-ILS coincidence spectroscopy. It is based on two MAC2 analysers. Criteria of coincidence spectroscopy in reflection mode are discussed, completing those described by Cazaux for transmission mode and considering the energy resolution, sampling depth, angle of incidence and detection. For reflection mode glancing incidence of primary electrons and low take off angle of ILS electrons are favourable. The angles are optimized by adjusting the electron gun position and by tilting the sample. A rough estimation of coincidence on a sample Ag trace on Si substrate is given.

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