Property improvement of pulsed laser deposited boron carbide films by pulse shortening

T. Csákó, J. Budai, T. Szörényi

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Growth characteristics and surface morphology of boron carbide films fabricated by ablating a B4C target in high vacuum with a traditional KrF excimer laser and a high brightness hybrid dye/excimer laser system emitting at the same wavelength while delivering 700 fs pulses are compared. The ultrashort pulse processing is highly effective. Energy densities between 0.25 and 2 J cm-2 result in apparent growth rates ranging from 0.017 to 0.085 nm/pulse. Ablation with nanosecond pulses of one order of magnitude higher energy densities yields smaller growth rates, the figures increase from 0.002 to 0.016 nm/pulse within the 2-14.3 J cm-2 fluence window. 2D thickness maps derived from variable angle spectroscopic ellipsometry reveal that, when ablating with sub-ps pulses, the spot size rather than the energy density determines both the deposition rate and the angular distribution of film material. Pulse shortening leads to significant improvement in surface morphology, as well. While droplets with number densities ranging from 1 × 104 to 7 × 104 mm-2 deteriorate the surface of the films deposited by the KrF excimer laser, sub-ps pulses produce practically droplet-free films. The absence of droplets has also a beneficial effect on the stoichiometry and homogeneity of the films fabricated by ultrashort pulses.

Original languageEnglish
Pages (from-to)4707-4711
Number of pages5
JournalApplied Surface Science
Volume252
Issue number13 SPEC. ISS.
DOIs
Publication statusPublished - Apr 30 2006

Fingerprint

Boron carbide
boron carbides
Pulsed lasers
Laser pulses
pulsed lasers
Excimer lasers
pulses
Ultrashort pulses
Surface morphology
excimer lasers
flux density
Dye lasers
Spectroscopic ellipsometry
Angular distribution
Ablation
Deposition rates
Stoichiometry
Luminance
Vacuum
Wavelength

Keywords

  • Nanostructure
  • PLD
  • Surface morphology
  • Thickness distribution
  • Thin films
  • Ultrashort pulse processing

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Property improvement of pulsed laser deposited boron carbide films by pulse shortening. / Csákó, T.; Budai, J.; Szörényi, T.

In: Applied Surface Science, Vol. 252, No. 13 SPEC. ISS., 30.04.2006, p. 4707-4711.

Research output: Contribution to journalArticle

@article{42b00aa3254648a6817c75f83181f3ea,
title = "Property improvement of pulsed laser deposited boron carbide films by pulse shortening",
abstract = "Growth characteristics and surface morphology of boron carbide films fabricated by ablating a B4C target in high vacuum with a traditional KrF excimer laser and a high brightness hybrid dye/excimer laser system emitting at the same wavelength while delivering 700 fs pulses are compared. The ultrashort pulse processing is highly effective. Energy densities between 0.25 and 2 J cm-2 result in apparent growth rates ranging from 0.017 to 0.085 nm/pulse. Ablation with nanosecond pulses of one order of magnitude higher energy densities yields smaller growth rates, the figures increase from 0.002 to 0.016 nm/pulse within the 2-14.3 J cm-2 fluence window. 2D thickness maps derived from variable angle spectroscopic ellipsometry reveal that, when ablating with sub-ps pulses, the spot size rather than the energy density determines both the deposition rate and the angular distribution of film material. Pulse shortening leads to significant improvement in surface morphology, as well. While droplets with number densities ranging from 1 × 104 to 7 × 104 mm-2 deteriorate the surface of the films deposited by the KrF excimer laser, sub-ps pulses produce practically droplet-free films. The absence of droplets has also a beneficial effect on the stoichiometry and homogeneity of the films fabricated by ultrashort pulses.",
keywords = "Nanostructure, PLD, Surface morphology, Thickness distribution, Thin films, Ultrashort pulse processing",
author = "T. Cs{\'a}k{\'o} and J. Budai and T. Sz{\"o}r{\'e}nyi",
year = "2006",
month = "4",
day = "30",
doi = "10.1016/j.apsusc.2005.07.103",
language = "English",
volume = "252",
pages = "4707--4711",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "13 SPEC. ISS.",

}

TY - JOUR

T1 - Property improvement of pulsed laser deposited boron carbide films by pulse shortening

AU - Csákó, T.

AU - Budai, J.

AU - Szörényi, T.

PY - 2006/4/30

Y1 - 2006/4/30

N2 - Growth characteristics and surface morphology of boron carbide films fabricated by ablating a B4C target in high vacuum with a traditional KrF excimer laser and a high brightness hybrid dye/excimer laser system emitting at the same wavelength while delivering 700 fs pulses are compared. The ultrashort pulse processing is highly effective. Energy densities between 0.25 and 2 J cm-2 result in apparent growth rates ranging from 0.017 to 0.085 nm/pulse. Ablation with nanosecond pulses of one order of magnitude higher energy densities yields smaller growth rates, the figures increase from 0.002 to 0.016 nm/pulse within the 2-14.3 J cm-2 fluence window. 2D thickness maps derived from variable angle spectroscopic ellipsometry reveal that, when ablating with sub-ps pulses, the spot size rather than the energy density determines both the deposition rate and the angular distribution of film material. Pulse shortening leads to significant improvement in surface morphology, as well. While droplets with number densities ranging from 1 × 104 to 7 × 104 mm-2 deteriorate the surface of the films deposited by the KrF excimer laser, sub-ps pulses produce practically droplet-free films. The absence of droplets has also a beneficial effect on the stoichiometry and homogeneity of the films fabricated by ultrashort pulses.

AB - Growth characteristics and surface morphology of boron carbide films fabricated by ablating a B4C target in high vacuum with a traditional KrF excimer laser and a high brightness hybrid dye/excimer laser system emitting at the same wavelength while delivering 700 fs pulses are compared. The ultrashort pulse processing is highly effective. Energy densities between 0.25 and 2 J cm-2 result in apparent growth rates ranging from 0.017 to 0.085 nm/pulse. Ablation with nanosecond pulses of one order of magnitude higher energy densities yields smaller growth rates, the figures increase from 0.002 to 0.016 nm/pulse within the 2-14.3 J cm-2 fluence window. 2D thickness maps derived from variable angle spectroscopic ellipsometry reveal that, when ablating with sub-ps pulses, the spot size rather than the energy density determines both the deposition rate and the angular distribution of film material. Pulse shortening leads to significant improvement in surface morphology, as well. While droplets with number densities ranging from 1 × 104 to 7 × 104 mm-2 deteriorate the surface of the films deposited by the KrF excimer laser, sub-ps pulses produce practically droplet-free films. The absence of droplets has also a beneficial effect on the stoichiometry and homogeneity of the films fabricated by ultrashort pulses.

KW - Nanostructure

KW - PLD

KW - Surface morphology

KW - Thickness distribution

KW - Thin films

KW - Ultrashort pulse processing

UR - http://www.scopus.com/inward/record.url?scp=33646595674&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33646595674&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2005.07.103

DO - 10.1016/j.apsusc.2005.07.103

M3 - Article

VL - 252

SP - 4707

EP - 4711

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

IS - 13 SPEC. ISS.

ER -