Properties of high-density amorphous carbon films deposited by laser ablation

Gergely Kovách, Hajnalka Csorbai, György Z. Radnóczi, György Vida, Zoltán Pászti, Gábor Peto, Albert Karacs

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

The properties of carbon films deposited by high intensity pulsed Nd:Glass laser are reported. Different measurements like TEM, SIMS, EELS, XPS and AFM showed the formation of a high-density amorphous carbon layer with good protection against chemically aggressive alkaline solutions. We demonstrated that instead of excimer lasers, Nd-based solid state lasers can be used successfully for preparation of high quality amorphous carbon films.

Original languageEnglish
Pages (from-to)127-132
Number of pages6
JournalMaterials Science Forum
Volume414-415
DOIs
Publication statusPublished - Jan 1 2003
Event3rd Hungarian Conference on Materials Science, Testing and Informatics - Balatonfured, Hungary
Duration: Oct 14 2001Oct 17 2001

Keywords

  • Chemically protective layer
  • Diamond-like carbon (DLC)
  • Graphite-like carbon (GLC)
  • Pulsed laser deposition (PLD)

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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