Problems on computer processing of SIMS spectra

J. Antal, S. Kugler

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The main problems of the interpretation of low resolution secondary ion mass spectra are treated and an evaluation program is presented for SIMS spectra. The programme searches automatically for monoatomic single and double charged ions as well as isoatomic and heteroatomic single charged cluster ions which are the most typical for SIMS spectra and provides also the total ionic current of these species.

Original languageEnglish
Pages (from-to)583-587
Number of pages5
JournalVacuum
Volume35
Issue number12
DOIs
Publication statusPublished - Dec 1985

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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