The comparitive analysis of the similarities and differences in growth characteristics of carbon and carbon nitride films fabricated by ablating identical graphite targets was presented. Film growth and properties were determined by the interaction of the carbon and gas species in the gas phase. The chemical effect permitted effective tuning of the chemical composition and structure of the films in the 1 - 100 Pa pressure window.
ASJC Scopus subject areas
- Physics and Astronomy(all)