Pressure control of properties of pulsed laser deposited carbon and carbon nitride films

Tamás Szörényi, Eric Fogarassy

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10 Citations (Scopus)

Abstract

The comparitive analysis of the similarities and differences in growth characteristics of carbon and carbon nitride films fabricated by ablating identical graphite targets was presented. Film growth and properties were determined by the interaction of the carbon and gas species in the gas phase. The chemical effect permitted effective tuning of the chemical composition and structure of the films in the 1 - 100 Pa pressure window.

Original languageEnglish
Pages (from-to)2097-2101
Number of pages5
JournalJournal of Applied Physics
Volume94
Issue number3
DOIs
Publication statusPublished - Aug 1 2003

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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