Preparation of stoichiometric barium stannate thin films: Hall measurements and gas sensitivities

Bernhard Ostrick, Maximilian Fleischer, Uwe Lampe, H. Meixner

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

Barium stannate (BaSnO3) is a typical compound with cubic perovskite lattice. For the first time thin films with a Ba/Sn ratio of 1 were prepared by radio frequency (r.f.) sputtering. Hall measurements were performed on the thin films in a temperature range between 600°C and 1050°C. The variation of Hall mobility and charge-carrier density was investigated in the oxygen partial pressure range between 102 Pa and 105 Pa. The gas sensitivities of the material in wet air were investigated by resistance measurements of sensor chips with sputtered BaSnO3 thin films. The material showed interesting responses to the reducing gases isobutene, H2, NO, CH4 and CO in application-relevant concentrations. The best sensitivities were obtained at temperatures below 700°C. At temperatures of 600°C the thin films showed response times of typically 3 min. The material was found to be insensitive to CO2 and NH3.

Original languageEnglish
Pages (from-to)601-606
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume44
Issue number1-3
Publication statusPublished - Oct 1997

Fingerprint

stannates
Barium
barium
Gases
Thin films
preparation
thin films
gases
Hall mobility
cubic lattices
Carbon Monoxide
Charge carriers
Partial pressure
Perovskite
Temperature
Carrier concentration
Sputtering
partial pressure
temperature
charge carriers

Keywords

  • Barium stannate
  • Gas sensitivities
  • Hall measurements

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Preparation of stoichiometric barium stannate thin films : Hall measurements and gas sensitivities. / Ostrick, Bernhard; Fleischer, Maximilian; Lampe, Uwe; Meixner, H.

In: Sensors and Actuators, B: Chemical, Vol. 44, No. 1-3, 10.1997, p. 601-606.

Research output: Contribution to journalArticle

Ostrick, Bernhard ; Fleischer, Maximilian ; Lampe, Uwe ; Meixner, H. / Preparation of stoichiometric barium stannate thin films : Hall measurements and gas sensitivities. In: Sensors and Actuators, B: Chemical. 1997 ; Vol. 44, No. 1-3. pp. 601-606.
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