Preparation of polycrystalline and microcrystalline germanium composite films by codeposition of active additives

P. Barna, M. Adamik, U. Kaiser, H. Hobert

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

It is shown experimentally that as-prepared polycrystalline Ge films of various crystallite sizes can be tailored by codepositing SiOx of different concentrations. The formation mechanisms of these structures are discussed by taking into account the theoretical structure zone models of polycrystalline films, interpreting the development of the tissue phases covering the grain boundaries. The key phenomenon of these mechanisms is the process-induced segregation of SiOx species on the growing surface of Ge crystals resulting in the formation of an SiOx tissue phase on the crystal surfaces and at the grain boundaries. This kinetic segregation model is proposed for the interpretation of the growth of nanocrystalline Si in case of chemical vapour deposition at high H2 dilution of SiH4.

Original languageEnglish
Pages (from-to)1063-1068
Number of pages6
JournalJournal of Non-Crystalline Solids
Volume227-230
Issue numberPART 2
Publication statusPublished - May 1998

Fingerprint

Germanium
Composite films
germanium
Grain boundaries
grain boundaries
Tissue
preparation
Crystals
composite materials
Crystallite size
crystal surfaces
Dilution
dilution
Chemical vapor deposition
coverings
vapor deposition
Kinetics
kinetics
crystals

Keywords

  • Microcrystalline Ge
  • Polycrystalline Ge
  • SiO

ASJC Scopus subject areas

  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

Cite this

Preparation of polycrystalline and microcrystalline germanium composite films by codeposition of active additives. / Barna, P.; Adamik, M.; Kaiser, U.; Hobert, H.

In: Journal of Non-Crystalline Solids, Vol. 227-230, No. PART 2, 05.1998, p. 1063-1068.

Research output: Contribution to journalArticle

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