Preparation of hydrogenated amorphous carbon films from polymers by nano- and femtosecond pulsed laser deposition

Judit Budai, Miklós Bereznai, Gábor Szakács, E. Szilágyi, Z. Tóth

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Hydrogenated amorphous carbon (a-C:H) films can be simply produced by pulsed laser deposition (PLD) from targets containing hydrogen and carbon, e.g. polymers. Films deposited from polyethyleneterephtalate (PET) and polycarbonate (PC) were compared to samples prepared from glassy carbon. Several lasers were used to explore the influence of pulse duration (∼30 ns and ∼500 fs) and wavelength (248 and 193 nm) on the properties of laser deposited films. The film composition was characterized by Rutherford backscattering spectrometry and elastic recoil detection analysis. Variable angle spectroscopic ellipsometry gave information about the thickness and optical properties of the films. It was demonstrated that a consistent interpretation of the laser ablation, caused by rather different laser sources on various targets, is possible using the parameter of volumetric power density (intensity divided by light or heat penetration depth). PLD from polymer targets resulted in amorphous hydrogenated films, where hydrogen and oxygen content was decreased compared to the composition of the original target. PLD from glassy carbon target resulted in graphitic, diamond like and porous carbon films with increasing volumetric power density.

Original languageEnglish
Pages (from-to)8235-8241
Number of pages7
JournalApplied Surface Science
Volume253
Issue number19
DOIs
Publication statusPublished - Jul 31 2007

Fingerprint

Carbon films
Amorphous carbon
Amorphous films
Pulsed laser deposition
pulsed laser deposition
Polymers
preparation
carbon
polymers
polycarbonate
Glassy carbon
glassy carbon
Lasers
Hydrogen
radiant flux density
Diamond
Spectroscopic ellipsometry
lasers
Rutherford backscattering spectroscopy
Laser ablation

Keywords

  • Carbon and polymer target
  • Laser ablation
  • Pulsed laser deposition

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Preparation of hydrogenated amorphous carbon films from polymers by nano- and femtosecond pulsed laser deposition. / Budai, Judit; Bereznai, Miklós; Szakács, Gábor; Szilágyi, E.; Tóth, Z.

In: Applied Surface Science, Vol. 253, No. 19, 31.07.2007, p. 8235-8241.

Research output: Contribution to journalArticle

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