Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction

P. Petrik, S. Milita, G. Pucker, A. G. Nassiopoulou, J. A. Van Den Berg, M. A. Reading, M. Fried, T. Lohner, M. Theodoropoulou, S. Gardelis, M. Barozzi, M. Ghulinyan, A. Lui, L. Vanzetti, A. Picciotto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The aim of a joint research activity in the FP6-ANNA project (http://www.i3-anna.org) is to develop and improve metrologies for the measurement of nanocrystal properties. Within the framework of this cooperation we optimized the sample preparation techniques to obtain a range of structures containing nanocrystals. Based on these samples we have optimized our characterization methods. In this work we focus on ellipsometry and X-ray diffraction measurements for the characterization of nanocrystal sizes in silicon rich oxide and porous silicon. We demonstrate the capabilities of dielectric function parametrizations in the ellipsometric evaluations, revealing the correlation between the broadening parameters of the critical point features and the nanocrystal size.

Original languageEnglish
Title of host publicationECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009
Pages373-378
Number of pages6
Edition3
DOIs
Publication statusPublished - Dec 1 2009
EventAnalytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 - 216th ECS Meeting - Vienna, Austria
Duration: Oct 4 2009Oct 9 2009

Publication series

NameECS Transactions
Number3
Volume25
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherAnalytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 - 216th ECS Meeting
CountryAustria
CityVienna
Period10/4/0910/9/09

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Petrik, P., Milita, S., Pucker, G., Nassiopoulou, A. G., Van Den Berg, J. A., Reading, M. A., Fried, M., Lohner, T., Theodoropoulou, M., Gardelis, S., Barozzi, M., Ghulinyan, M., Lui, A., Vanzetti, L., & Picciotto, A. (2009). Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction. In ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 (3 ed., pp. 373-378). (ECS Transactions; Vol. 25, No. 3). https://doi.org/10.1149/1.3204427