Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction

P. Petrik, S. Milita, G. Pucker, A. G. Nassiopoulou, J. A. Van Den Berg, M. A. Reading, M. Fried, T. Lohner, M. Theodoropoulou, S. Gardelis, M. Barozzi, M. Ghulinyan, A. Lui, L. Vanzetti, A. Picciotto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The aim of a joint research activity in the FP6-ANNA project (http://www.i3-anna.org) is to develop and improve metrologies for the measurement of nanocrystal properties. Within the framework of this cooperation we optimized the sample preparation techniques to obtain a range of structures containing nanocrystals. Based on these samples we have optimized our characterization methods. In this work we focus on ellipsometry and X-ray diffraction measurements for the characterization of nanocrystal sizes in silicon rich oxide and porous silicon. We demonstrate the capabilities of dielectric function parametrizations in the ellipsometric evaluations, revealing the correlation between the broadening parameters of the critical point features and the nanocrystal size.

Original languageEnglish
Title of host publicationECS Transactions
Pages373-378
Number of pages6
Volume25
Edition3
DOIs
Publication statusPublished - 2009
EventAnalytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 - 216th ECS Meeting - Vienna, Austria
Duration: Oct 4 2009Oct 9 2009

Other

OtherAnalytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 - 216th ECS Meeting
CountryAustria
CityVienna
Period10/4/0910/9/09

Fingerprint

Ellipsometry
Nanocrystals
X ray diffraction
Porous silicon
Silicon
Oxides

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Petrik, P., Milita, S., Pucker, G., Nassiopoulou, A. G., Van Den Berg, J. A., Reading, M. A., ... Picciotto, A. (2009). Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction. In ECS Transactions (3 ed., Vol. 25, pp. 373-378) https://doi.org/10.1149/1.3204427

Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction. / Petrik, P.; Milita, S.; Pucker, G.; Nassiopoulou, A. G.; Van Den Berg, J. A.; Reading, M. A.; Fried, M.; Lohner, T.; Theodoropoulou, M.; Gardelis, S.; Barozzi, M.; Ghulinyan, M.; Lui, A.; Vanzetti, L.; Picciotto, A.

ECS Transactions. Vol. 25 3. ed. 2009. p. 373-378.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Petrik, P, Milita, S, Pucker, G, Nassiopoulou, AG, Van Den Berg, JA, Reading, MA, Fried, M, Lohner, T, Theodoropoulou, M, Gardelis, S, Barozzi, M, Ghulinyan, M, Lui, A, Vanzetti, L & Picciotto, A 2009, Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction. in ECS Transactions. 3 edn, vol. 25, pp. 373-378, Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009 - 216th ECS Meeting, Vienna, Austria, 10/4/09. https://doi.org/10.1149/1.3204427
Petrik P, Milita S, Pucker G, Nassiopoulou AG, Van Den Berg JA, Reading MA et al. Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction. In ECS Transactions. 3 ed. Vol. 25. 2009. p. 373-378 https://doi.org/10.1149/1.3204427
Petrik, P. ; Milita, S. ; Pucker, G. ; Nassiopoulou, A. G. ; Van Den Berg, J. A. ; Reading, M. A. ; Fried, M. ; Lohner, T. ; Theodoropoulou, M. ; Gardelis, S. ; Barozzi, M. ; Ghulinyan, M. ; Lui, A. ; Vanzetti, L. ; Picciotto, A. / Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction. ECS Transactions. Vol. 25 3. ed. 2009. pp. 373-378
@inproceedings{d80c12d80d26476983ef54c4ba442eab,
title = "Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction",
abstract = "The aim of a joint research activity in the FP6-ANNA project (http://www.i3-anna.org) is to develop and improve metrologies for the measurement of nanocrystal properties. Within the framework of this cooperation we optimized the sample preparation techniques to obtain a range of structures containing nanocrystals. Based on these samples we have optimized our characterization methods. In this work we focus on ellipsometry and X-ray diffraction measurements for the characterization of nanocrystal sizes in silicon rich oxide and porous silicon. We demonstrate the capabilities of dielectric function parametrizations in the ellipsometric evaluations, revealing the correlation between the broadening parameters of the critical point features and the nanocrystal size.",
author = "P. Petrik and S. Milita and G. Pucker and Nassiopoulou, {A. G.} and {Van Den Berg}, {J. A.} and Reading, {M. A.} and M. Fried and T. Lohner and M. Theodoropoulou and S. Gardelis and M. Barozzi and M. Ghulinyan and A. Lui and L. Vanzetti and A. Picciotto",
year = "2009",
doi = "10.1149/1.3204427",
language = "English",
isbn = "9781566777407",
volume = "25",
pages = "373--378",
booktitle = "ECS Transactions",
edition = "3",

}

TY - GEN

T1 - Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction

AU - Petrik, P.

AU - Milita, S.

AU - Pucker, G.

AU - Nassiopoulou, A. G.

AU - Van Den Berg, J. A.

AU - Reading, M. A.

AU - Fried, M.

AU - Lohner, T.

AU - Theodoropoulou, M.

AU - Gardelis, S.

AU - Barozzi, M.

AU - Ghulinyan, M.

AU - Lui, A.

AU - Vanzetti, L.

AU - Picciotto, A.

PY - 2009

Y1 - 2009

N2 - The aim of a joint research activity in the FP6-ANNA project (http://www.i3-anna.org) is to develop and improve metrologies for the measurement of nanocrystal properties. Within the framework of this cooperation we optimized the sample preparation techniques to obtain a range of structures containing nanocrystals. Based on these samples we have optimized our characterization methods. In this work we focus on ellipsometry and X-ray diffraction measurements for the characterization of nanocrystal sizes in silicon rich oxide and porous silicon. We demonstrate the capabilities of dielectric function parametrizations in the ellipsometric evaluations, revealing the correlation between the broadening parameters of the critical point features and the nanocrystal size.

AB - The aim of a joint research activity in the FP6-ANNA project (http://www.i3-anna.org) is to develop and improve metrologies for the measurement of nanocrystal properties. Within the framework of this cooperation we optimized the sample preparation techniques to obtain a range of structures containing nanocrystals. Based on these samples we have optimized our characterization methods. In this work we focus on ellipsometry and X-ray diffraction measurements for the characterization of nanocrystal sizes in silicon rich oxide and porous silicon. We demonstrate the capabilities of dielectric function parametrizations in the ellipsometric evaluations, revealing the correlation between the broadening parameters of the critical point features and the nanocrystal size.

UR - http://www.scopus.com/inward/record.url?scp=77649230136&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77649230136&partnerID=8YFLogxK

U2 - 10.1149/1.3204427

DO - 10.1149/1.3204427

M3 - Conference contribution

AN - SCOPUS:77649230136

SN - 9781566777407

VL - 25

SP - 373

EP - 378

BT - ECS Transactions

ER -