Practical Limits for Optical Test of Spatial Resolution in Advanced Imaging Devices

I. Bársony, Akimasa Tanaka

Research output: Contribution to journalArticle

Abstract

Decreasing pixel size, perfection of isolation, and improved dynamic range of advanced imaging devices requires an adequate optical arrangement to check crosstalk behavior within the pixel matrix. The Fraunhofer diffraction pattern, an inherent feature of any focused circular beam, leads to unintended direct illumination of the neighbors even if accurately centered. A simple setup has been applied to determine the beam profile focused down to the sub wavelength range. We propose to characterize the beam focusing for spatial resolution tests by the first zero-to-zero width independent of peak intensity. We provide an estimate of minimum requirements to be fulfilled in order to test for a given crosstalk and demonstrate their importance on filled trench-isolated pixels.

Original languageEnglish
Pages (from-to)267-270
Number of pages4
JournalIEEE Transactions on Electron Devices
Volume34
Issue number2
DOIs
Publication statusPublished - 1987

Fingerprint

spatial resolution
Pixels
pixels
Crosstalk
crosstalk
Imaging techniques
beam leads
Optical resolving power
Diffraction patterns
dynamic range
isolation
diffraction patterns
Lighting
illumination
Wavelength
requirements
estimates
matrices
profiles
wavelengths

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)

Cite this

Practical Limits for Optical Test of Spatial Resolution in Advanced Imaging Devices. / Bársony, I.; Tanaka, Akimasa.

In: IEEE Transactions on Electron Devices, Vol. 34, No. 2, 1987, p. 267-270.

Research output: Contribution to journalArticle

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