Powerful tools for thermal characterisation of MEMS

P. Fürjes, Gy Bognár, I. Bársony

Research output: Contribution to conferencePaper

Abstract

Thermal aspects of design and fabrication of sensor structures based on thermally isolated heater filaments [1] were investigated with special attention to their dynamic properties. Thermal engineering was aided by high performance simulation methods, such as finite element modelling (COSMOS) and thermal equivalent circuit simulation using successive network reduction method (SUNRED). The detailed static and dynamic thermal behaviour of the structure was experimentally characterised applying high resolution thermography system of the Thermosensorik GmbH and termal transient tester (T3Ster) of the MicReD Ltd.

Original languageEnglish
Pages1109-1112
Number of pages4
Publication statusPublished - Dec 1 2004
EventIEEE Sensors 2004 - Vienna, Austria
Duration: Oct 24 2004Oct 27 2004

Other

OtherIEEE Sensors 2004
CountryAustria
CityVienna
Period10/24/0410/27/04

Keywords

  • Microheater
  • Thermal modelling and charactrisation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Fürjes, P., Bognár, G., & Bársony, I. (2004). Powerful tools for thermal characterisation of MEMS. 1109-1112. Paper presented at IEEE Sensors 2004, Vienna, Austria.