Powerful tools for thermal characterisation of MEMS

P. Fürjes, Gy Bognár, I. Bársony

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Thermal aspects of design and fabrication of sensor structures based on thermally isolated heater filaments [Cs. Dücso{combining double acute accent}, et al., Porous Si bulk micro-machining for thermally isolated membrane formation, Sens. Actuators A 60 (1997) 235-243 [1]] were investigated with special attention to their dynamic properties in order to demonstrate the outstanding possibilities of modelling and characterisation tools in analysis MEMS structures. Thermal engineering was aided by high performance simulation methods, such as finite element modelling (COSMOS) and thermal equivalent circuit simulation using successive network reduction method (SUNRED). The detailed static and dynamic thermal behaviour of the structure was experimentally characterised by applying the high resolution thermography system of the Thermosensorik GmbH and thermal transient tester (T3Ster) of the MicReD Ltd.

Original languageEnglish
Pages (from-to)270-277
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume120
Issue number1
DOIs
Publication statusPublished - Dec 14 2006

Fingerprint

microelectromechanical systems
MEMS
test equipment
equivalent circuits
heaters
machining
dynamic characteristics
filaments
simulation
actuators
engineering
membranes
fabrication
high resolution
sensors
Sodium Glutamate
Circuit simulation
Equivalent circuits
Machining
Actuators

Keywords

  • Microheater
  • Thermal modelling and characterisation

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Powerful tools for thermal characterisation of MEMS. / Fürjes, P.; Bognár, Gy; Bársony, I.

In: Sensors and Actuators, B: Chemical, Vol. 120, No. 1, 14.12.2006, p. 270-277.

Research output: Contribution to journalArticle

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